Series 3 – Market Leader of Industrial WLIs

Hundreds of production lines worldwide are based on the market leading industrial WLIs™ of series 3.

heliInspect™ H6 – Industrial WLI

Compact, modular and proven

  • topology measurement with reliable sub-micrometer resolution
  • based on the 3D pixel sensor heliSens™ S3
  • unsurpassed measurement speed and resolution
  • robust measurements thanks to high dynamic range
  • Magnifications from 2x to 100x

Diverse applications

  • 3D geometry such as step heights, angles, radii
  • Roughness according to EN ISO 25178
  • Flatness and coplanarity
  • thickness of transparent layers

Software

  • heliSDK™ with examples for Halcon, C++, LabVIEW, Python
  • heliViewer™

H6DS0002.pdf

1.87 MB

H6 SystemsGuide H6SG006.pdf

1.05 MB

heliInspect™ H4 – Industrial WLI

Large measuring field, interferometric height resolution

  • flat topology measurement with reliable sub-micrometer resolution
  • based on the 3D pixel sensor heliSens™ S3
  • unsurpassed measurement speed and resolution
  • robust measurements thanks to high dynamic range
  • fixed measuring field 11.1 mm x 11.6 

Wide range of applications

  • 3D geometry such as step heights, angles, radii
  • Flatness and coplanarity
  • thickness of transparent layers

Software

  • heliSDK™ with examples for Halcon, C++, LabVIEW, Python
  • heliViewer™

H4DS.pdf

4.44 MB

H4 SystemsGuide H4SG006.pdf

893.02 KB
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heliInspect™ H3 – Industrial WLI

Full 3D tomography with high lateral resolution

  • interchangable WLI-optics with integrated sumperluminescence lighting
  • based on the 3D pixel sensor heliSens™ S3
  • unsurpassed measurement speed and resolution
  • robust measurements thanks to high dynamic range
  • measuring fields from 0.5 x 0.5 mm2 to 3 x 3 mm2

Wide range of applications

  • structures and defects in transparent volumes
  • thickness of transparent layers

Software

  • heliSDK™ with examples for Halcon, C++, LabVIEW, Python
  • heliViewer™

H3DS0013.pdf

4.74 MB

Modular WLI measuring head
heliCam™ C3 + WLI7

Large measuring fields, long working distances

  • measuring fields up to 35 x 35 mm2
  • customer-specific optics (telecentric)
  • based on the 3D pixel sensor heliSens™ S3
  • unsurpassed measurement speed and resolution
  • robust measurements thanks to high dynamic range

Wide range of applications

  • flatness, coplanarity
  • bends
  • defects
  • volume of glue/lot paste/etc.

Software

  • heliSDK™ with examples for Halcon, C++, LabVIEW, Python
  • heliViewer™

C3DS0015.pdf

326.76 KB

Modular WLI kit

Ideal for OEM integrators

  • compatible modules, flexibly combinable
  • unsurpassed measurement speed and resolution
  • robust measurements thanks to high dynamic range
  • WLI signal processing on image sensor and camera

High resolutions in all 3 dimensions

  • Mirau lenses with magnifications from 10x to 100x
  • integrated LED lighting (red or blue)
  • Precision scanner: Linear or piezo drive

Software

  • heliSDK™ with examples for Halcon, C++, LabVIEW, Python
  • Windows and Linux

WLI5DS0001.pdf

1.82 MB

WLI5 SystemsGuide WLI5SG006.pdf

848.02 KB
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