In the last decade, a variety of different 3D sensors have come onto the market. However, most optical sensors only work on matt surfaces, others only on reflective surfaces. If components with tolerances in the micrometer range are to be measured, the selection of sensors quickly becomes thin. It should be noted that even with component tolerances of a few 1/100mm repeatability in the sub-micrometer range is required. It is precisely for these applications that Heliotis is expanding its heliInspect product line with the high-resolution H8M and H9M models. Like their predecessors, these rely on the measurement method of white light interferometry (WLI). In addition to a height resolution in the nanometer range, this optical process is characterized by the fact that practically all surfaces and materials can be measured: from matt to reflective to transparent. In addition, the measurement data from WLI sensors are free of shading, which further increases their application possibilities.

Read our article in the latest issue of inVISION: Inline Micro-Metrology