Heliotis will present its high-resolution 3D sensors for industrial production at the fair. The focus is on in-line testing of components in the micrometer and sub-micrometer range. Typical inspection tasks concern roughness (area), planarity, shape or defects. The non-contact measurement method, the high measuring speed and a robust design contribute to the line suitability. In addition to components for machine integration, we also present complete solutions for laboratory measurements and for at-line applications/sample testing.